Oxide Sputtering Target

Oxide Sputtering Target
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Oxide Sputtering Target
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Description

Rare earth oxide sputtering targets are primarily composed of rare earth elements such as cerium, neodymium, yttrium, etc. These rare earth elements, due to their unique electronic structure, are widely used in the manufacturing of thin films with special functionalities. For example, rare earth targets are used in display technology to manufacture luminescent layers or in data storage technology to produce high-density storage materials.

High Purity: Rare earth oxide targets typically have high purity, which helps maintain the purity and consistency of the material during thin film deposition.

Diverse Physical and Chemical Properties: Different rare earth elements possess unique electronic structures and physical-chemical properties, making rare earth oxide targets adaptable to a wide range of applications.

High Melting Point: For instance, the melting point of yttrium oxide (Y2O3) is as high as 2425°C, demonstrating its high-temperature stability.

Typical Applications: Semiconductor and Photovoltaic Industries: Rare earth oxide targets are used to prepare thin films with special electrical and optical properties, such as high dielectric constants, specific optical properties, or specific conductivity, which find extensive applications in sensors, photovoltaic cells, and display technology.

Display Technology: Rare earth targets are utilized in display technology to manufacture luminescent layers, enhancing display performance and color rendition.

Data Storage Technology: They are used to manufacture high-density storage materials, improving data storage efficiency and density.

Special Ceramics and Electronics Industries: Materials like yttrium oxide are used as electronic ceramics and capacitor materials due to their high dielectric constant and chemical stability.

Below are some of the oxide targets we commonly provide. Feel free to contact us via phone or online consultation if you have any requirements.

 

BiSmO3

Bi3LuFe5O12

BiYO3

BaY0FeO2

CeO2/Gd2O3

CeO2

Eu2O3

Er2O3

Gd2O3

GdBaCuO

Gd3Fe5O12

(Gd3Al5O12)(CeO2

Gd2O3/Sc2O3/Ga2O3

Ho2O3

LaNiO3

LaFeO3

LaMnO3

LaVO3

LSMOLaSrMnO3

LaAgSeO

LaBiFeO3

La2O3/Ga2O3

La2O3

LSCO

LaAl2O3

LaBaCuO2.5

SrCoO3La

NdNiO3

NdSrNiO3

NdSrMnO3

Nd2O3

Pr6O11/Pr2O3

PrBa2Cu3O7

PrBa2(Cu3Ga)3O7

Pr2NiO4

PrSrNiO3

Sc2O3

SmNiO3

Sm2O3

In2O3/Er2O3

Tb4O7

Tm2O3

Y203-Zro2

Y3Fe5O12

Y3ScGa5O12

Y2O3

YSZ

Y3Al5O12

Manufacture MethodHot Pressing (HP), Hot/Cold Isostatic Pressing (HIP, CIP), Vacuum Melting, Vacuum Sintering

Features:

• High purity, high density (Close to 100%), low gas content

• Grain refinement

• Semiconductor grade

• High utilization efficiency

Production Process:

Raw Material Preparation - Melting - Forging - Rolling - Heat Treatment - Machining - Quality Inspection - Packaging - Shipping

Customized Size

Circular: Diameter <= 14 inch, Thickness >= 1mm;

Rectangle: Length <= 48 inch, Width <= 15.75 inch, Thickness >= 1mm.

For larger product sizes, we can do 45-degree or 90-degree angle tiles.

If you have other requirements, we can customize for you. Please provide drawings (PDF, JPG, PNG).

LXAM offers high-quality products at competitive prices and welcomes inquiries, promising a response within 24 hours.



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